Jonas Michael-Lindhard

Jonas Michael-Lindhard

Process Specialist, M.Sc.

DTU DANCHIP
Nationalt Center for Mikro- and Nanofabrikation

Technical University of Denmark

Ørsteds Plads

Building 347, room 078

2800 Kgs. Lyngby

Ph.
Fax +45 45 25 57 22
E-mail jml@danchip.dtu.dk
ORCID 0000-0003-0478-6015
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Publications
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2017
 

Low surface damage dry etched black silicon

Plakhotnyuk, Maksym ; Gaudig, Maria ; Davidsen, Rasmus Schmidt ; Michael-Lindhard, Jonas ; Hirsch, Jens ; Lausch, Dominik ; Schmidt, Michael Stenbæk ; Stamate, Eugen ; Hansen, Ole
in journal: Journal of Applied Physics (ISSN: 0021-8979) (DOI: http://dx.doi.org/10.1063/1.4993425), vol: 122, issue: 14, 2017

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2017     |    DOI: http://dx.doi.org/10.1063/1.4993425

2016
  PDF

Full-field hard x-ray microscopy with interdigitated silicon lenses

Simons, Hugh ; Stöhr, Frederik ; Michael-Lindhard, Jonas ; Jensen, Flemming ; Hansen, Ole ; Detlefs, Carsten ; Poulsen, Henning Friis
in journal: Optics Communications (ISSN: 0030-4018) (DOI: http://dx.doi.org/10.1016/j.optcom.2015.09.103), vol: 359, pages: 460-464, 2016

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2016     |    DOI: http://dx.doi.org/10.1016/j.optcom.2015.09.103

  PDF

Fabrication of high aspect ratio TiO2 and Al2O3 nanogratings by atomic layer deposition

Shkondin, Evgeniy ; Takayama, Osamu ; Michael-Lindhard, Jonas ; Larsen, Pernille Voss ; Mar, Mikkel Dysseholm ; Jensen, Flemming ; Lavrinenko, Andrei
in journal: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films (ISSN: 0734-2101) (DOI: http://dx.doi.org/10.1116/1.4947586), vol: 34, issue: 3, 2016

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2016     |    DOI: http://dx.doi.org/10.1116/1.4947586

2015
 

Three-dimensional nanometrology of microstructures by replica molding and large-range atomic force microscopy

Stöhr, Frederik ; Michael-Lindhard, Jonas ; Simons, Hugh ; Poulsen, Henning Friis ; Hübner, Jörg ; Hansen, Ole ; Garnæs, Jørgen ; Jensen, Flemming
in journal: Microelectronic Engineering (ISSN: 0167-9317) (DOI: http://dx.doi.org/10.1016/j.mee.2014.11.026), vol: 141, pages: 6-11, 2015

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2015     |    DOI: http://dx.doi.org/10.1016/j.mee.2014.11.026

  PDF

Fabrication of TiO2 and Al2O3 High Aspect Ratio Nanostructured Gratings at Sub-Micrometer Scale

Shkondin, Evgeniy ; Michael-Lindhard, Jonas ; Mar, Mikkel Dysseholm ; Jensen, Flemming ; Lavrinenko, Andrei
Presented at:
15th International Conference on Atomic Layer Deposition, 2015, Portland, Oregon

Type: Paper (Peer reviewed)

Status: Published     |    Year: 2015

  PDF

Sacrificial structures for deep reactive ion etching of high-aspect ratio kinoform silicon x-ray lenses

Stöhr, Frederik ; Michael-Lindhard, Jonas ; Hübner, Jörg ; Jensen, Flemming ; Simons, Hugh ; Jakobsen, Anders Clemen ; Poulsen, Henning Friis ; Hansen, Ole
in journal: Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures (ISSN: 1071-1023) (DOI: http://dx.doi.org/10.1116/1.4931622), vol: 33, issue: 6, 2015

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2015     |    DOI: http://dx.doi.org/10.1116/1.4931622

 

Optimizing shape uniformity and increasing structure heights of deep reactive ion etched silicon x-ray lenses

Stöhr, Frederik ; Wright, Jonathan ; Simons, Hugh ; Michael-Lindhard, Jonas ; Hübner, Jörg ; Jensen, Flemming ; Hansen, Ole ; Poulsen, Henning Friis
in journal: Journal of Micromechanics and Microengineering (ISSN: 0960-1317) (DOI: http://dx.doi.org/10.1088/0960-1317/25/12/125013), vol: 25, issue: 12, 2015

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2015     |    DOI: http://dx.doi.org/10.1088/0960-1317/25/12/125013

  PDF

Injection molded polymeric hard X-ray lenses

Stöhr, Frederik ; Simons, Hugh ; Jakobsen, Anders Clemen ; Nielsen, Claus Højgård ; Michael-Lindhard, Jonas ; Jensen, Flemming ; Poulsen, Henning Friis ; Hansen, Ole ; Hübner, Jörg
in journal: Optical Materials Express (ISSN: 2159-3930) (DOI: http://dx.doi.org/10.1364/OME.5.002804), vol: 5, issue: 12, pages: 2804-2811, 2015

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2015     |    DOI: http://dx.doi.org/10.1364/OME.5.002804

  PDF

Polymer injection molding of hard X-ray refractive optics

Stöhr, Frederik ; Michael-Lindhard, Jonas ; Simons, Hugh ; Jakobsen, Anders Clemen ; Hübner, Jörg ; Jensen, Flemming ; Hansen, Ole ; Poulsen, Henning Friis
Presented at:
41st International conference on Micro and Nano Engineering , 2015, The Hague

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    Year: 2015

2014
 

Etching patterns on the micro‐ and nanoscale

Michael-Lindhard, Jonas ; Herstrøm, Berit ; Stöhr, Frederik ; Jensen, Flemming
part of: Abstract Book - DTU Sustain Conference 2014, 2014, Technical University of Denmark (DTU), Kgs. Lyngby
Presented at:
DTU Sustain Conference 2014, 2014, Lyngby

Type: Conference abstract in proceedings (Peer reviewed)

Status: Published     |    Year: 2014