Vy Thi Hoang Nguyen

Vy Thi Hoang Nguyen

PhD student

DTU NANOLAB
DTU Nanolab - National Centre for Nano Fabrication and Characterization

Technical University of Denmark

Akademivej

Building 358, room 006

2800 Kgs. Lyngby

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2020
 

Deep reactive ion etching of ‘grass-free’ widely-spaced periodic 2D arrays, using sacrificial structures

Silvestre, Chantal M. ; Nguyen, Vy Thi Hoang ; Jansen, Henri ; Hansen, Ole
in: Microelectronic Engineering, vol: 223

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2020     |    DOI: https://doi.org/10.1016/j.mee.2020.111228

 

The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF6/O2 Cycles with Excellent 3D Profile Control at Room Temperature

Nguyen, Vy Thi Hoang ; Silvestre, Chantal ; Shi, Peixiong ; Cork, Roy ; Jensen, Flemming ; Hubner, Jorg ; Ma, Kechun ; Leussink, Pele ; de Boer, Meint ; Jansen, Henri
in: ECS Journal of Solid State Science and Technology, vol: 9, issue: 2

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2020     |    DOI: https://doi.org/10.1149/2162-8777/ab61ed

2019
  PDF

On the formation of Black Silicon in SF6-O2 plasma: The CORE sequence and BSi on Demand

Nguyen, Vy Thi Hoang
Presented at:
45th International conference on Micro and Nano Engineering

Type: Sound/Visual production (digital) (Peer reviewed)

Status: Published     |    Year: 2019