Peixiong Shi

Peixiong Shi

Principal Engineer, Ph.D.

DTU NANOLAB
DTU Nanolab - National Centre for Nano Fabrication and Characterization

Technical University of Denmark

Ørsteds Plads

Building 347, room 084

2800 Kgs. Lyngby

Ph.
Fax +45 45 25 57 22
E-mail pxshi@dtu.dk
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Publications
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2020
 

The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF6/O2 Cycles with Excellent 3D Profile Control at Room Temperature

Nguyen, Vy Thi Hoang ; Silvestre, Chantal ; Shi, Peixiong ; Cork, Roy ; Jensen, Flemming ; Hubner, Jorg ; Ma, Kechun ; Leussink, Pele ; de Boer, Meint ; Jansen, Henri
in: ECS Journal of Solid State Science and Technology, vol: 9, issue: 2

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2020     |    DOI: https://doi.org/10.1149/2162-8777/ab61ed

2018
 

In-depth evolution of chemical states and sub-10-nm-resolution crystal orientation mapping of nanograins in Ti(5 nm)/Au(20 nm)/Cr(3 nm) tri-layer thin films

Zhu, Xiaoli ; Todeschini, Matteo ; Bastos da Silva Fanta, Alice ; Liu, Lintao ; Jensen, Flemming ; Hübner, Jörg ; Jansen, Henri ; Han, Anpan ; Shi, Peixiong ; Ming, Anjie ; Xie, Changqing
in: Applied Surface Science, vol: 453, pages: 365-372

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2018     |    DOI: https://doi.org/10.1016/j.apsusc.2018.05.042

2017
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Nanofabrication and characterization of high-line-density x-ray transmission gratings

Zhu, Xiaoli ; Li, Hailiang ; Cao, Leifeng ; Liu, Shenye ; Shi, Peixiong ; Xie, Changqing
in: Journal of Micro-nanolithography Mems and Moems, vol: 16, issue: 3, pages: 034503

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2017     |    DOI: https://doi.org/10.1117/1.JMM.16.3.034503

2016
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Key Techniques on Preparing High Aspect Ratio Micro and Nano Structures

Jian, Zhao ; Lianhe, Dong ; Xiaoli, Zhu ; Changqing, Xie ; Baoqin, Chen ; Shi, Peixiong
in: Wei-Na Dianzi Jishu, vol: 53, issue: 10, pages: 685-690

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2016     |    DOI: https://doi.org/10.13250/j.cnki.wndz.2016.10.008

2014
 

Phase transition of bismuth telluride thin films grown by MBE

Fülöp, Attila ; Song, Yuxin ; Charpentier, Sophie ; Shi, Peixiong ; Ekström, Maria ; Galletti, Luca ; Arpaia, Riccardo ; Bauch, Thilo ; Lombardi, Floriana ; Wang, Shumin
in: Applied Physics Express, vol: 7, issue: 4, pages: 045503

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2014

 

Self-assembling morphologies of symmetrical PS-b-PMMA in different sized confining grooves

Chen, Wenhui ; Luo, Jun ; Shi, Peixiong ; Li, Chunlong ; He, Xiaobin ; Hong, Peizhen ; Li, Junfeng ; Zhao, Chao
in: R S C Advances, vol: 4, issue: 92, pages: 50393-50400

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2014     |    DOI: https://doi.org/10.1039/c4ra09573a

2013
 

Dilute bismides for near and mid-infrared applications

Song, Yuxin ; Gu, Yi ; Ye, Hong ; Shi, Peixiong ; Hallen, Anders ; Chen, Xiren ; Shao, Jun ; Wang, Shumin
part of: Proceedings of International Conference on Transparent Optical Networks (ICTON), 2013, IEEE
Presented at:
15th International Conference on Transparent Optical Networks (ICTON)

Type: Article in proceedings (Peer reviewed)

Status: Published     |    Year: 2013     |    DOI: https://doi.org/10.1109/ICTON.2013.6602735

 

Molecular beam epitaxy growth of InSb1−xBix thin films

Song, Yuxin ; Wang, Shumin ; Saha Roy, Ivy ; Shi, Peixiong ; Hallen, Anders ; Lai, Zonghe
in: Journal of Crystal Growth, vol: 378, pages: 323-328

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2013     |    DOI: https://doi.org/10.1016/j.jcrysgro.2012.12.085

 

Molecular beam epitaxy growth of InSb1-xBix thin films

Yuxin Song, ; Shumin Wang, ; Saha Roy, Ivy ; Shi, Peixiong ; Hallen, Anders ; Lai, Zonghe
in: Journal of Crystal Growth, vol: 378, pages: 323-328

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2013

2012
 

Growth of GaSb1-xBix by molecular beam epitaxy

Song, Yuxin ; Wang, Shumin ; Roy, Ivy Saha ; Shi, Peixiong ; Hallen, Anders
in: Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures, vol: 30, issue: 2, pages: 02B114

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2012     |    DOI: https://doi.org/10.1116/1.3672025