Roy Cork

Roy Cork

Chief Equipment Engineer

DTU NANOLAB
DTU Nanolab - National Centre for Nano Fabrication and Characterization

Technical University of Denmark

Ørsteds Plads

Building 346, room 057

2800 Kgs. Lyngby

Ph.
Mobile
Fax +45 45 25 57 22
E-mail roco@dtu.dk
Home page

Request a vCard via e-mail.

Publications
Loading

Publications rss feed

2020
 

The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF6/O2 Cycles with Excellent 3D Profile Control at Room Temperature

Nguyen, Vy Thi Hoang ; Silvestre, Chantal ; Shi, Peixiong ; Cork, Roy ; Jensen, Flemming ; Hubner, Jorg ; Ma, Kechun ; Leussink, Pele ; de Boer, Meint ; Jansen, Henri
in: ECS Journal of Solid State Science and Technology, vol: 9, issue: 2

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2020     |    DOI: https://doi.org/10.1149/2162-8777/ab61ed