Bingdong Chang

Bingdong Chang

Postdoc

DTU NANOLAB
DTU Nanolab - Nationalt Center for Nanofabrikation og -karakterisering

Danmarks Tekniske Universitet

Ørsteds Plads

Bygning 347, rum 178

2800 Kgs. Lyngby

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Publikationer
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2018
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High-Confinement, High-Q Microring Resonators on Silicon Carbide-On-Insulator (SiCOI)

Zheng, Yi ; Yi, Ailun ; Pu, Minhao ; Chang, Bingdong ; You, Tiangui ; Huang, Kai ; Ou, Xin ; Ou, Haiyan
part of: Proceedings of Asia Communications and Photonics Conference, 2018, IEEE
Presented at:
2018 Asia Communications and Photonics Conference

Type: Article in proceedings (Peer reviewed)

Status: Published     |    År: 2018     |    DOI: https://doi.org/10.1109/ACP.2018.8595751

 

Inductively coupled plasma nanoetching of atomic layer deposition alumina

Han, Anpan ; Chang, Bingdong ; Todeschini, Matteo ; Le, Hoa Thanh ; Tiddi, William ; Keil, Matthias
in: Microelectronic Engineering, vol: 193, pages: 28-33

Type: Journal article (Peer reviewed)

Status: Published     |    År: 2018     |    DOI: https://doi.org/10.1016/j.mee.2018.02.023

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Three dimensional engineering of silicon micro- and nanostructures

Chang, Bingdong ; Jensen, Flemming ; Hübner, Jörg ; Jansen, Henri
Presented at:
44th International conference on Micro and Nano Engineering

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    År: 2018

2017
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Infinite Etching Selectivity with Conventional Photoresist in a Bosch Process

Chang, Bingdong ; Leussink, Pele ; Jensen, Flemming ; Hübner, Jörg ; Jansen, Henri
Presented at:
43rd International conference on Micro and Nano Engineering

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    År: 2017

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Microfabrication of X-Ray grating for Talbot Interferometry

Silvestre, Chantal ; Chang, Bingdong ; Jansen, Henri ; Hansen, Ole
Presented at:
43rd International conference on Micro and Nano Engineering

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    År: 2017

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RIE-lag “Correction” in Bosch Etch Process of Silicon to Enable Profile Straightness and Improved Scallop Size Distribution

Chang, Bingdong ; Leussink, Pele ; Jensen, Flemming ; Hübner, Jörg ; Jansen, Henri
Presented at:
43rd International conference on Micro and Nano Engineering

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    År: 2017