Elena Khomtchenko

Elena Khomtchenko

Processpecialist, M.Sc.

DTU NANOLAB
DTU Nanolab - Nationalt Center for Nanofabrikation og -karakterisering

Danmarks Tekniske Universitet

Ørsteds Plads

Bygning 347, rum 080

2800 Kgs. Lyngby

Tlf.
Fax 45 25 57 22
E-mail elkh@dtu.dk
Hjemmeside

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Publikationer
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2015
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Deep-UV-Lithography: Principles, Optimization, and Simulation

Keil, Matthias ; Møller, Niels Peder ; Khomtchenko, Elena ; Johansen, Leif Steen
part of: Book of Abstracts. DTU's Sustain Conference 2015, 2015, Technical University of Denmark (DTU), Lyngby
Presented at:
DTU Sustain Conference 2015

Type: Conference abstract in proceedings (Peer reviewed)

Status: Published     |    År: 2015

2014
 

Electron Beam Lithography for nano-patterning

Greibe, Tine ; Anhøj, Thomas Aarøe ; Khomtchenko, Elena ; Michael-Lindhard, Jonas ; Johansen, Leif
part of: Abstract Book - DTU Sustain Conference 2014, 2014, Technical University of Denmark (DTU), Kgs. Lyngby
Presented at:
DTU Sustain Conference 2014

Type: Conference abstract in proceedings (Peer reviewed)

Status: Published     |    År: 2014

 

Pattern Definition with DUV-Lithography at DTU Danchip

Keil, Matthias ; Khomtchenko, Elena ; Nyholt, Henrik ; Gregersen, Anders ; Johansen, Leif
part of: Abstract Book - DTU Sustain Conference 2014, 2014, Technical University of Denmark (DTU), Kgs. Lyngby
Presented at:
DTU Sustain Conference 2014

Type: Conference abstract in proceedings (Peer reviewed)

Status: Published     |    År: 2014

2009
 

Photolithography of thick photoresist coating for electrically controlled liquid crystal photonic bandgap fibre devices

Wei, Lei ; Khomtchenko, Elena ; Alkeskjold, Thomas Tanggaard ; Bjarklev, Anders Overgaard
in: Electronics Letters, vol: 45, issue: 6, pages: 326-327

Type: Journal article (Peer reviewed)

Status: Published     |    År: 2009     |    DOI: https://doi.org/10.1049/el.2009.3609

  PDF

Photolithography of thick photoresist coating in anisotropically etched V-grooves for electrically controlled liquid crystal photonic bandgap fiber devices

Wei, Lei ; Khomtchenko, Elena ; Alkeskjold, Thomas Tanggaard ; Bjarklev, Anders Overgaard
part of: Proceedings, OFC, pages: 1-3, 2009, IEEE
Presented at:
2009 Optical Fiber Communication Conference and Exposition and the National Fiber Optic Engineers Conference, OFC/NFOEC

Type: Article in proceedings (Peer reviewed)

Status: Published     |    År: 2009