Matthias Keil

Matthias Keil

Processpecialist, Ph.D.

DTU NANOLAB
DTU Nanolab - Nationalt Center for Nanofabrikation og -karakterisering

Danmarks Tekniske Universitet

Ørsteds Plads, Byg. 347

Bygning 347, rum 080

2800 Lyngby

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Publikationer
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2018
 

Inductively coupled plasma nanoetching of atomic layer deposition alumina

Han, Anpan ; Chang, Bingdong ; Todeschini, Matteo ; Le, Hoa Thanh ; Tiddi, William ; Keil, Matthias
in: Microelectronic Engineering, vol: 193, pages: 28-33

Type: Journal article (Peer reviewed)

Status: Published     |    År: 2018     |    DOI: https://doi.org/10.1016/j.mee.2018.02.023

2015
  PDF

Deep-UV-Lithography: Principles, Optimization, and Simulation

Keil, Matthias ; Møller, Niels Peder ; Khomtchenko, Elena ; Johansen, Leif Steen
part of: Book of Abstracts. DTU's Sustain Conference 2015, 2015, Technical University of Denmark (DTU), Lyngby
Presented at:
DTU Sustain Conference 2015

Type: Conference abstract in proceedings (Peer reviewed)

Status: Published     |    År: 2015

2014
 

Pattern Definition with DUV-Lithography at DTU Danchip

Keil, Matthias ; Khomtchenko, Elena ; Nyholt, Henrik ; Gregersen, Anders ; Johansen, Leif
part of: Abstract Book - DTU Sustain Conference 2014, 2014, Technical University of Denmark (DTU), Kgs. Lyngby
Presented at:
DTU Sustain Conference 2014

Type: Conference abstract in proceedings (Peer reviewed)

Status: Published     |    År: 2014