Jörg Hübner

Jörg Hübner

Direktør

DTU NANOLAB
DTU Nanolab - Nationalt Center for Nanofabrikation og -karakterisering

Danmarks Tekniske Universitet

Akademivej

Bygning 358, rum 003B

2800 Lyngby

Få tilsendt vCard på e-mail.

Publikationer
Projekter
Aktiviteter
CV
Loading

Publikationer rss feed

2019
 

Large Area Three-Dimensional Photonic Crystal Membranes: Single-Run Fabrication and Applications with Embedded Planar Defects

Chang, Bingdong ; Zhou, Chen ; Tarekegne, Abebe Tilahun ; Yang, Yuanqing ; Zhao, Ding ; Jensen, Flemming ; Hübner, Jörg ; Jansen, Henri
in: Advanced Optical Materials, vol: 7, issue: 2

Type: Journal article (Peer reviewed)

Status: Published     |    År: 2019     |    DOI: https://doi.org/10.1002/adom.201801176

2018
  PDF

DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro- and nanostructures by a modified Bosch etch process

Chang, Bingdong ; Jensen, Flemming ; Hübner, Jörg ; Jansen, Henri
in: Journal of Micromechanics and Microengineering, vol: 28, issue: 10

Type: Journal article (Peer reviewed)

Status: Published     |    År: 2018     |    DOI: https://doi.org/10.1088/1361-6439/aad0c4

  PDF

DREM: Infinite etch selectivity and optimized scallop size distribution with conventional photoresists in an adapted multiplexed Bosch DRIE process

Chang, Bingdong ; Leussink, Pele ; Jensen, Flemming ; Hübner, Jörg ; Jansen, Henri
in: Microelectronic Engineering, vol: 191, pages: 77-83

Type: Journal article (Peer reviewed)

Status: Published     |    År: 2018     |    DOI: https://doi.org/10.1016/j.mee.2018.01.034

 

In-depth evolution of chemical states and sub-10-nm-resolution crystal orientation mapping of nanograins in Ti(5 nm)/Au(20 nm)/Cr(3 nm) tri-layer thin films

Zhu, Xiaoli ; Todeschini, Matteo ; Bastos da Silva Fanta, Alice ; Liu, Lintao ; Jensen, Flemming ; Hübner, Jörg ; Jansen, Henri ; Han, Anpan ; Shi, Peixiong ; Ming, Anjie ; Xie, Changqing
in: Applied Surface Science, vol: 453, pages: 365-372

Type: Journal article (Peer reviewed)

Status: Published     |    År: 2018     |    DOI: https://doi.org/10.1016/j.apsusc.2018.05.042

  PDF

Three dimensional engineering of silicon micro- and nanostructures

Chang, Bingdong ; Jensen, Flemming ; Hübner, Jörg ; Jansen, Henri
Presented at:
44th International conference on Micro and Nano Engineering

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    År: 2018

2017
  PDF

Infinite Etching Selectivity with Conventional Photoresist in a Bosch Process

Chang, Bingdong ; Leussink, Pele ; Jensen, Flemming ; Hübner, Jörg ; Jansen, Henri
Presented at:
43rd International conference on Micro and Nano Engineering

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    År: 2017

  PDF

RIE-lag “Correction” in Bosch Etch Process of Silicon to Enable Profile Straightness and Improved Scallop Size Distribution

Chang, Bingdong ; Leussink, Pele ; Jensen, Flemming ; Hübner, Jörg ; Jansen, Henri
Presented at:
43rd International conference on Micro and Nano Engineering

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    År: 2017

2015
  PDF

Injection molded polymeric hard X-ray lenses

Stöhr, Frederik ; Simons, Hugh ; Jakobsen, Anders Clemen ; Nielsen, Claus Højgård ; Michael-Lindhard, Jonas ; Jensen, Flemming ; Poulsen, Henning Friis ; Hansen, Ole ; Hübner, Jörg
in: Optical Materials Express, vol: 5, issue: 12, pages: 2804-2811

Type: Journal article (Peer reviewed)

Status: Published     |    År: 2015     |    DOI: https://doi.org/10.1364/OME.5.002804

 

Optimizing shape uniformity and increasing structure heights of deep reactive ion etched silicon x-ray lenses

Stöhr, Frederik ; Wright, Jonathan ; Simons, Hugh ; Michael-Lindhard, Jonas ; Hübner, Jörg ; Jensen, Flemming ; Hansen, Ole ; Poulsen, Henning Friis
in: Journal of Micromechanics and Microengineering, vol: 25, issue: 12

Type: Journal article (Peer reviewed)

Status: Published     |    År: 2015     |    DOI: https://doi.org/10.1088/0960-1317/25/12/125013