Bingdong Chang

Bingdong Chang

Postdoc

DTU NANOLAB
DTU Nanolab - Nationalt Center for Nanofabrikation og -karakterisering

Danmarks Tekniske Universitet

Ørsteds Plads

Bygning 347, rum 178

2800 Kgs. Lyngby

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2018
 

Inductively coupled plasma nanoetching of atomic layer deposition alumina

Han, Anpan ; Chang, Bingdong ; Todeschini, Matteo ; Le, Hoa Thanh ; Tiddi, William ; Keil, Matthias
in: Microelectronic Engineering, vol: 193, pages: 28-33

Type: Journal article (Peer reviewed)

Status: Published     |    År: 2018     |    DOI: https://doi.org/10.1016/j.mee.2018.02.023